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With the rapid development of the microelectronics industry, the high reliability, multi-function and high integration of integrated circuits put forward more stringent requirements for high-purity gases. For example, the processing of VLSI and VHSIC devices requires high-purity and dry (no water) And dust-free gas. The manufacturing of new generation VLSI microelectronic products requires higher quality gas. We have formulated effective solutions for the gases required in the manufacturing process of microelectronic products, ensuring the efficiency of gas interception.
